The ultra-high purity gas delivery systems in microelectronics facilities play a key role in the production of the sensitive components we rely on every day. But the parts that make up these important systems don’t last forever.
Our client, a major microelectronics component producer located on the East Coast, faced a dilemma: Inert regulator sticks inside ten of their valve manifold boxes were nearing the end of their service lives. Replacements were necessary. The customer had two options, and each was unattractive:
The customer approached High Purity Systems in search of a cost-effective alternative that wouldn’t result in months of downtime.
Next, we ordered the materials. Because the part would be used in high purity microelectronic manufacturing, we ordered 316L stainless steel components. The elevated chromium content in 316L stainless steel offers improved corrosion resistance over other stainless steel formulas. The wetted surfaces of the components were electropolished to 10 Ra or better, further improving their corrosion resistance.
Then, we fabricated the parts. Due to the sensitive nature of the components, this was done in our in-house Class 100 cleanroom. Our skilled craftsmen used autogenous orbital welding equipment to perform welds meeting ASME B31.3 and SEMI standards.